Toshiaki Makabe
Toshiaki Makabe
Verified email at tempus.keio.ac.jp
Title
Cited by
Cited by
Year
Plasma electronics: applications in microelectronic device fabrication
T Makabe, ZL Petrovic
CRC Press, 2014
3892014
Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
T Kitajima, Y Takeo, ZL Petrović, T Makabe
Applied Physics Letters 77 (4), 489-491, 2000
2392000
Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz
T Makabe, N Nakano, Y Yamaguchi
Physical Review A 45 (4), 2520, 1992
1581992
Simulations of rf glow discharges in SF 6 by the relaxation continuum model: Physical structure and function of the narrow-gap reactive-ion etcher
N Nakano, N Shimura, ZL Petrović, T Makabe
Physical Review E 49 (5), 4455, 1994
1341994
Transport coefficients and scattering cross-sections for plasma modelling in CF4-Ar mixtures: a swarm analysis
M Kurihara, ZL Petrovic, T Makabe
Journal of Physics D: Applied Physics 33 (17), 2146, 2000
1222000
The effect of topographical local charging on the etching of deep-submicron structures in as a function of aspect ratio
J Matsui, N Nakano, ZL Petrović, T Makabe
Applied Physics Letters 78 (7), 883-885, 2001
982001
Kinetic phenomena in electron transport in radio-frequency fields
ZL Petrović, ZM Raspopović, S Dujko, T Makabe
Applied surface science 192 (1-4), 1-25, 2002
932002
Effect of O2(a1Δg) on plasma structures in oxygen radio frequency discharges
M Shibata, N Nakano, T Makabe
Journal of applied physics 80 (11), 6142-6147, 1996
891996
Modeling of a rf glow discharge plasma
K Okazaki, T Makabe, Y Yamaguchi
Applied physics letters 54 (18), 1742-1744, 1989
891989
Spatiotemporal optical emission spectroscopy of rf discharges in SF6
ZL Petrović, F Tochikubo, S Kakuta, T Makabe
Journal of applied physics 73 (5), 2163-2172, 1993
851993
Study of the structure in rf glow discharges in SiH4/H2 by spatiotemporal optical emission spectroscopy: Influence of negative ions
F Tochikubo, A Suzuki, S Kakuta, Y Terazono, T Makabe
Journal of applied physics 68 (11), 5532-5539, 1990
831990
Two-dimensional CT images of two-frequency capacitively coupled plasma
T Kitajima, Y Takeo, T Makabe
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (5 …, 1999
801999
O2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing
M Shibata, N Nakano, T Makabe
Journal of applied physics 77 (12), 6181-6187, 1995
781995
Functional design of a pulsed two-frequency capacitively coupled plasma in for etching
K Maeshige, G Washio, T Yagisawa, T Makabe
Journal of applied physics 91 (12), 9494-9501, 2002
752002
Functional separation in two frequency operation of an inductively coupled plasma
T Denda, Y Miyoshi, Y Komukai, T Goto, ZL Petrović, T Makabe
Journal of applied physics 95 (3), 870-876, 2004
742004
Diffusion tensor in electron transport in gases in a radio-frequency field
K Maeda, T Makabe, N Nakano, S Bzenic-acute, ZL Petrovic-acute
Physical review E 55 (5), 5901, 1997
741997
Two-dimensional self-consistent simulation of a DC magnetron discharge
E Shidoji, H Ohtake, N Nakano, T Makabe
Japanese journal of applied physics 38 (4R), 2131, 1999
711999
Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar
M Tadokoro, H Hirata, N Nakano, ZL Petrović, T Makabe
Physical Review E 58 (6), 7823, 1998
711998
Influence of negative ions in rf glow discharges in SiH 4 at 13.56 MHz
T Makabe, F Tochikubo, M Nishimura
Physical Review A 42 (6), 3674, 1990
701990
Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy
F Tochikubo, T Kokubo, S Kakuta, A Suzuki, T Makabe
Journal of Physics D: Applied Physics 23 (9), 1184, 1990
671990
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