עקוב אחר
Igor Krylov
Igor Krylov
כתובת אימייל מאומתת בדומיין technion.ac.il
כותרת
צוטט על ידי
צוטט על ידי
שנה
Experimental evidence for the correlation between the weak inversion hump and near midgap states in dielectric/InGaAs interfaces
I Krylov, L Kornblum, A Gavrilov, D Ritter, M Eizenberg
Applied Physics Letters 100 (17), 2012
562012
The physical origin of dispersion in accumulation in InGaAs based metal oxide semiconductor gate stacks
I Krylov, D Ritter, M Eizenberg
Journal of Applied Physics 117 (17), 2015
452015
Indium outdiffusion and leakage degradation in metal/Al2O3/In0. 53Ga0. 47As capacitors
I Krylov, A Gavrilov, M Eizenberg, D Ritter
Applied Physics Letters 103 (5), 2013
332013
Correlation between Ga-O signature and midgap states at the Al2O3/In0. 53Ga0. 47As interface
I Krylov, A Gavrilov, M Eizenberg, D Ritter
Applied Physics Letters 101 (6), 2012
332012
Indium out-diffusion in Al2O3/InGaAs stacks during anneal at different ambient conditions
I Krylov, R Winter, D Ritter, M Eizenberg
Applied Physics Letters 104 (24), 2014
282014
Ferroelectricity of as-deposited HZO fabricated by plasma-enhanced atomic layer deposition at 300° C by inserting TiO2 interlayers
Y Qi, X Xu, I Krylov, M Eizenberg
Applied Physics Letters 118 (3), 2021
242021
Obtaining low resistivity (∼ 100 μΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
I Krylov, E Zoubenko, K Weinfeld, Y Kauffmann, X Xu, D Ritter, ...
Journal of Vacuum Science & Technology A 36 (5), 2018
242018
Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
I Krylov, X Xu, Y Qi, K Weinfeld, V Korchnoy, M Eizenberg, D Ritter
Journal of Vacuum Science & Technology A 37 (6), 2019
192019
Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
I Krylov, X Xu, E Zoubenko, K Weinfeld, S Boyeras, F Palumbo, ...
Journal of Vacuum Science & Technology A 36 (6), 2018
162018
The effect of post oxide deposition annealing on the effective work function in metal/Al2O3/InGaAs gate stack
R Winter, I Krylov, J Ahn, PC McIntyre, M Eizenberg
Applied Physics Letters 104 (20), 2014
162014
A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
I Krylov, B Pokroy, M Eizenberg, D Ritter
Journal of Applied Physics 120 (12), 2016
152016
Understanding leakage currents through Al2O3 on SrTiO3
D Miron, I Krylov, M Baskin, E Yalon, L Kornblum
Journal of Applied Physics 126 (18), 2019
142019
Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
I Krylov, X Xu, K Weinfeld, V Korchnoy, D Ritter, M Eizenberg
Journal of Vacuum Science & Technology A 37 (1), 2019
142019
A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
I Krylov, B Pokroy, D Ritter, M Eizenberg
Journal of Applied Physics 119 (8), 2016
132016
The role of the substrate on the dispersion in accumulation in III-V compound semiconductor based metal-oxide-semiconductor gate stacks
I Krylov, D Ritter, M Eizenberg
Applied Physics Letters 107 (10), 2015
132015
Impact of bilayered oxide stacks on the breakdown transients of metal–oxide–semiconductor devices: An experimental study
SM Pazos, S Boyeras Baldomá, FL Aguirre, I Krylov, M Eizenberg, ...
Journal of Applied Physics 127 (17), 2020
122020
HfxAlyO ternary dielectrics for InGaAs based metal-oxide-semiconductor capacitors
I Krylov, D Ritter, M Eizenberg
Journal of Applied Physics 122 (3), 2017
122017
Fermi level pinning in metal/Al2O3/InGaAs gate stack after post metallization annealing
R Winter, I Krylov, C Cytermann, K Tang, J Ahn, PC McIntyre, M Eizenberg
Journal of Applied Physics 118 (5), 2015
122015
Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
I Krylov, Y Qi, V Korchnoy, K Weinfeld, M Eizenberg, E Yalon
Journal of Vacuum Science & Technology A 38 (3), 2020
112020
Elimination of the weak inversion hump in Si3N4/InGaAs (001) gate stacks using an in situ NH3 pre-treatment
I Krylov, A Gavrilov, D Ritter, M Eizenberg
Applied Physics Letters 99 (20), 2011
112011
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מאמרים 1–20