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Somilkumar Rathi
Somilkumar Rathi
Startup-Apple-Eugenus-ASM-Intel
Verified email at asu.edu
Title
Cited by
Cited by
Year
Tin-catalyzed plasma-assisted growth of silicon nanowires
SJ Rathi, BN Jariwala, JD Beach, P Stradins, PC Taylor, X Weng, Y Ke, ...
The Journal of Physical Chemistry C 115 (10), 3833-3839, 2011
702011
On the electronic and geometric structures of armchair GeC nanotubes: a hybrid density functional study
SJ Rathi, AK Ray
Nanotechnology 19 (33), 335706, 2008
402008
Guided VLS growth of epitaxial lateral Si nanowires
SJ Rathi, DJ Smith, J Drucker
Nano letters 13 (8), 3878-3883, 2013
332013
On the existence and stability of single walled SiGe nanotubes
SJ Rathi, AK Ray
Chemical Physics Letters 466 (1-3), 79-83, 2008
262008
Carbon monoxide-induced reduction and healing of graphene oxide
B Narayanan, SL Weeks, BN Jariwala, B Macco, JW Weber, SJ Rathi, ...
Journal of Vacuum Science & Technology A 31 (4), 2013
212013
Free standing silica thin films with highly ordered perpendicular nanopores
J Cheng, SJ Rathi, P Stradins, GL Frey, RT Collins, SKR Williams
RSC advances 4 (15), 7627-7633, 2014
182014
A hybrid density functional study of zigzag and chiral Si nanotubes
SJ Rathi, AK Ray
Journal of Computational and Theoretical Nanoscience 5 (4), 464-475, 2008
182008
Dual hydrogen barrier layer for memory devices
N Sato, N Mukherjee, M Manfrini, T Gosavi, RK Dokania, SJ Rathi, ...
US Patent 11,869,928, 2024
122024
Optimization of In2Se3/Si(111) Heteroepitaxy To Enable Bi2Se3/In2Se3 Bilayer Growth
SJ Rathi, DJ Smith, J Drucker
Crystal Growth & Design 14 (9), 4617-4623, 2014
112014
Multi-region diffusion barrier containing titanium, silicon and nitrogen
VV Vats, MZ Karim, BS Choi, SJ Rathi, N Mukherjee
US Patent 11,942,365, 2024
52024
Achieving near-zero temperature coefficient of resistivity in atomic layer deposition TiSixN films through composition tuning
C Feit, S Chugh, AR Dhamdhere, HY Kim, S Dabas, SJ Rathi, ...
Journal of Vacuum Science & Technology A 38 (6), 2020
52020
Conformal titanium nitride-based thin films and methods of forming same
N Mukherjee, HY Kim, J Mack, JS Heo, SH Jung, SJ Rathi, S Chugh, ...
US Patent 11,361,992, 2022
42022
Titanium silicon nitride barrier layer
JS Heo, J Mack, SJ Rathi, N Mukherjee
US Patent 11,832,537, 2023
22023
Ab initio study of the structure and properties of amorphous silicon hydride from accelerated molecular dynamics simulations
R Atta-Fynn, SJ Rathi, H Arya, P Biswas
Journal of Non-Crystalline Solids 622, 122641, 2023
12023
Diffusion barrier properties of atomic layer deposited TiSiN films
SY Lee, J Mack, HY Kim, SH Jung, SJ Rathi, N Mukherjee
Materials Letters 315, 131912, 2022
12022
Dual hydrogen barrier layer for trench capacitors integrated with low density film for logic structures
SJ Rathi, N Sato, N Mukherjee, RK Dokania, A Mathuriya, T Gosavi, ...
US Patent 11,961,877, 2024
2024
Dual hydrogen barrier layer for trench capacitors integrated with low density film for logic structures and methods of fabrication
SJ Rathi, N Sato, N Mukherjee, RK Dokania, A Mathuriya, T Gosavi, ...
US Patent 11,955,512, 2024
2024
Method of fabricating a perovskite-material based planar capacitor using rapid thermal annealing (RTA) methodologies
N Mukherjee, SJ Rathi, JY Wu, P Pandey, Z Ren, FNU Atiquzzaman, ...
US Patent 11,908,704, 2024
2024
Method of fabricating a perovskite-material based trench capacitor using rapid thermal annealing (RTA) methodologies
N Mukherjee, SJ Rathi, JY Wu, P Pandey, Z Ren, FNU Atiquzzaman, ...
US Patent 11,894,417, 2024
2024
Multi-level hydrogen barrier layers for memory applications
N Sato, N Mukherjee, M Manfrini, T Gosavi, RK Dokania, SJ Rathi, ...
US Patent 11,871,584, 2024
2024
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