| Mean energy required to produce an electron-hole pair in silicon for photons of energies between 50 and 1500 eV F Scholze, H Rabus, G Ulm Journal of Applied Physics 84 (5), 2926-2939, 1998 | 191 | 1998 |
| A quarter‐century of metrology using synchrotron radiation by PTB in Berlin B Beckhoff, A Gottwald, R Klein, M Krumrey, R Müller, M Richter, ... physica status solidi (b) 246 (7), 1415-1434, 2009 | 182 | 2009 |
| Modelling the response function of energy dispersive X‐ray spectrometers with silicon detectors F Scholze, M Procop X‐Ray Spectrometry: An International Journal 38 (4), 312-321, 2009 | 149 | 2009 |
| High-accuracy radiometry in the EUV range at the PTB soft x-ray beamline F Scholze, J Tümmler, G Ulm Metrologia 40 (1), S224, 2003 | 143 | 2003 |
| Determination of the electron–hole pair creation energy for semiconductors from the spectral responsivity of photodiodes F Scholze, H Henneken, P Kuschnerus, H Rabus, M Richter, G Ulm Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2000 | 142 | 2000 |
| Measurement of detection efficiency and response functions for an Si (Li) x‐ray spectrometer in the range 0.1–5 keV F Scholze, M Procop X‐Ray Spectrometry: An International Journal 30 (2), 69-76, 2001 | 129 | 2001 |
| X-ray ccd calibration for the axaf ccd imaging spectrometer MW Bautz, MJ Pivovaroff, F Baganoff, T Isobe, SE Jones, SE Kissel, ... X-Ray Optics, Instruments, and Missions 3444, 210-224, 1998 | 116 | 1998 |
| High precision soft x‐ray reflectometer D Fuchs, M Krumrey, P Müller, F Scholze, G Ulm Review of Scientific Instruments 66 (2), 2248-2250, 1995 | 114 | 1995 |
| Recent developments of wide-bandgap semiconductor based UV sensors A Benmoussa, A Soltani, U Schühle, K Haenen, YM Chong, WJ Zhang, ... Diamond and Related Materials 18 (5-8), 860-864, 2009 | 109 | 2009 |
| High-accuracy EUV metrology of PTB using synchrotron radiation F Scholze, B Beckhoff, G Brandt, R Fliegauf, A Gottwald, R Klein, B Meyer, ... Metrology, inspection, and process control for microlithography XV 4344, 402-413, 2001 | 106 | 2001 |
| Low energy response of silicon pn-junction detector R Hartmann, D Hauff, P Lechner, R Richter, L Strüder, J Kemmer, S Krisch, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 1996 | 101 | 1996 |
| Characterization of a windowless Si (Li) detector in the photon energy range 0.1–5 keV F Scholze, G Ulm Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 1994 | 98 | 1994 |
| Effect of line roughness on the diffraction intensities in angular resolved scatterometry A Kato, F Scholze Applied Optics 49 (31), 6102-6110, 2010 | 82 | 2010 |
| The PTB high-accuracy spectral responsivity scale in the VUV and x-ray range A Gottwald, U Kroth, M Krumrey, M Richter, F Scholze, G Ulm Metrologia 43 (2), S125, 2006 | 81 | 2006 |
| Progress in Mo/Si multilayer coating technology for EUVL optics E Louis, AE Yakshin, PC Goerts, S Oestreich, R Stuik, ELG Maas, ... Emerging Lithographic Technologies IV 3997, 406-411, 2000 | 80 | 2000 |
| Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS compatibility LK Nanver, L Qi, V Mohammadi, KRM Mok, WB De Boer, N Golshani, ... IEEE Journal of Selected Topics in Quantum Electronics 20 (6), 306-316, 2014 | 74 | 2014 |
| Plane grating monochromator beamline for VUV radiometry F Scholze, M Krumrey, P Müller, D Fuchs Review of scientific instruments 65 (10), 3229-3232, 1994 | 74 | 1994 |
| Characterization of photodiodes as transfer detector standards in the 120 nm to 600 nm spectral range P Kuschnerus, H Rabus, M Richter, F Scholze, L Werner, G Ulm Metrologia 35 (4), 355, 1998 | 71 | 1998 |
| Calibration and characterization of semiconductor X-ray detectors with synchrotron radiation M Krumrey, M Gerlach, F Scholze, G Ulm Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2006 | 68 | 2006 |
| Response of niobium-based superconducting tunnel junctions in the soft-x-ray region 0.15–6.5 keV P Verhoeve, N Rando, J Verveer, A Peacock, A Van Dordrecht, P Videler, ... Physical Review B 53 (2), 809, 1996 | 67 | 1996 |
Michael KrumreyPhysikalisch-Technische BundesanstaltVerified email at ptb.de
