Tom Leviant
Tom Leviant
KLA - Optical Metrology Division
Verified email at kla.com - Homepage
Title
Cited by
Cited by
Year
Robust Magnetic Properties of a Sublimable Single-Molecule Magnet
E Kiefl, M Mannini, K Bernot, X Yi, A Amato, T Leviant, A Magnani, ...
ACS nano 10 (6), 5663-5669, 2016
312016
Accuracy in optical overlay metrology
B Bringoltz, T Marciano, T Yaziv, Y DeLeeuw, D Klein, Y Feler, I Adam, ...
Metrology, Inspection, and Process Control for Microlithography XXX 9778, 97781H, 2016
172016
Methods of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology
T Marciano, B Bringoltz, E Gurevich, I Adam, Z Lindenfeld, Z Zhao, Y Feler, ...
US Patent App. 15/198,902, 2016
112016
Quantum ignition of deflagration in the Fe 8 molecular magnet
T Leviant, A Keren, E Zeldov, Y Myasoedov
Physical Review B 90 (13), 134405, 2014
62014
Testing the radiation emanating from the molecular nanomagnet Fe 8 during magnetization reversals
T Leviant, S Hanany, Y Myasoedov, A Keren
Physical Review B 90 (5), 054420, 2014
32014
Accuracy improvements in optical metrology
B Bringoltz, E Gurevich, I Adam, Y Feler, D Alumot, Y Lamhot, N Sella, ...
US Patent App. 15/540,409, 2018
2018
Process resilient overlay target designs for advanced memory manufacture
J Lee, M Jung, H Lee, Y Kim, S Han, ME Adel, T Itzkovich, V Levinski, ...
Metrology, Inspection, and Process Control for Microlithography XXXI 10145 …, 2017
2017
Analyzing and utilizing landscapes
T Marciano, B Bringoltz, E Gurevich, A Ido, Z Zeng, Y Feler, D Kandel, ...
2016
Accuracy In Optical Overlay Metrology The physics by which process variations determine accuracy and robustness of overlay metrology. January 18th, 2017-By: KLA
B Bringoltz, T Marciano, T Yaziv, Y DeLeeuw, D Klein, Y Feler, I Adam, ...
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