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Paul Muralt
Paul Muralt
Professor in Materials Science, EPFL, Lausanne, Switzerland
Verified email at epfl.ch - Homepage
Title
Cited by
Cited by
Year
Thin film piezoelectrics for MEMS
S Trolier-McKinstry, P Muralt
Journal of Electroceramics 12, 7-17, 2004
12232004
Ferroelectric thin films for micro-sensors and actuators: a review
P Muralt
Journal of micromechanics and microengineering 10 (2), 136, 2000
10912000
Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications
MA Dubois, P Muralt
Applied Physics Letters 74 (20), 3032-3034, 1999
5601999
PZT thin films for microsensors and actuators: Where do we stand?
P Muralt
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 47 …, 2000
4442000
{1 0 0}-Textured, piezoelectric Pb (Zrx, Ti1− x) O3 thin films for MEMS: integration, deposition and properties
N Ledermann, P Muralt, J Baborowski, S Gentil, K Mukati, M Cantoni, ...
Sensors and Actuators A: Physical 105 (2), 162-170, 2003
4362003
Recent progress in materials issues for piezoelectric MEMS
P Muralt
Journal of the American Ceramic Society 91 (5), 1385-1396, 2008
4012008
Micromachined infrared detectors based on pyroelectric thin films
P Muralt
Reports on progress in physics 64 (10), 1339, 2001
3972001
Piezoelectric thin films for sensors, actuators, and energy harvesting
P Muralt, RG Polcawich, S Trolier-McKinstry
MRS bulletin 34 (9), 658-664, 2009
3642009
Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering
MA Dubois, P Muralt
Journal of Applied Physics 89 (11), 6389-6395, 2001
3642001
Piezoelectric micromachined ultrasonic transducers based on PZT thin films
P Muralt, N Ledermann, J Paborowski, A Barzegar, S Gentil, B Belgacem, ...
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 52 …, 2005
3632005
Thickness dependence of the properties of highly c-axis textured AlN thin films
F Martin, P Muralt, MA Dubois, A Pezous
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (2 …, 2004
3572004
Measurement of the effective transverse piezoelectric coefficient e31, f of AlN and Pb (Zrx, Ti1− x) O3 thin films
MA Dubois, P Muralt
Sensors and Actuators A: Physical 77 (2), 106-112, 1999
3341999
Texture control of and thin films with seeding
P Muralt, T Maeder, L Sagalowicz, S Hiboux, S Scalese, D Naumovic, ...
Journal of Applied Physics 83 (7), 3835-3841, 1998
3271998
Scanning tunneling potentiometry
P Muralt, DW Pohl
Applied Physics Letters 48 (8), 514-516, 1986
3041986
Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size
S Bühlmann, B Dwir, J Baborowski, P Muralt
Integrated Ferroelectrics 50 (1), 261-267, 2002
2892002
A micro-solid oxide fuel cell system as battery replacement
A Bieberle-Hütter, D Beckel, A Infortuna, UP Muecke, JLM Rupp, ...
Journal of Power Sources 177 (1), 123-130, 2008
2632008
Fabrication and characterization of PZT thin-film vibrators for micromotors
P Muralt, M Kohli, T Maeder, A Kholkin, K Brooks, N Setter, R Luthier
Sensors and Actuators A: Physical 48 (2), 157-165, 1995
2431995
Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions
P Muralt, A Kholkin, M Kohli, T Maeder
Sensors and Actuators A: Physical 53 (1-3), 398-404, 1996
2421996
Piezoelectric thin films for MEMS
P Muralt
Integrated Ferroelectrics 17 (1-4), 297-307, 1997
2271997
Piezoelectric aluminum nitride thin films for microelectromechanical systems
G Piazza, V Felmetsger, P Muralt, RH Olsson III, R Ruby
MRS bulletin 37 (11), 1051-1061, 2012
2212012
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