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Karim Huet
Karim Huet
SCREEN Semiconductor Solutions Co., Ltd.
Verified email at screen-lasse.com
Title
Cited by
Cited by
Year
Ultra Low Thermal Budget Laser Thermal Annealing for 3D Semiconductor and Photovoltaic Applications
K Huet
NCCAVS, 2012
2022012
Ultra low thermal budget anneals for 3D memories: Access device formation
K Huet, C Boniface, R Negru, J Venturini
AIP Conference Proceedings 1496 (1), 135-138, 2012
1922012
Suppression of the orientation effects on bandgap in graphene nanoribbons in the presence of edge disorder
D Querlioz, Y Apertet, A Valentin, K Huet, A Bournel, S Galdin-Retailleau, ...
Applied Physics Letters 92 (4), 2008
1422008
On the ability of the particle Monte Carlo technique to include quantum effects in nano-MOSFET simulation
D Querlioz, J Saint-Martin, K Huet, A Bournel, V Aubry-Fortuna, C Chassat, ...
IEEE transactions on electron devices 54 (9), 2232-2242, 2007
972007
New insights on bottom layer thermal stability and laser annealing promises for high performance 3D VLSI
C Fenouillet-Beranger, B Mathieu, B Previtali, MP Samson, N Rambal, ...
2014 IEEE International Electron Devices Meeting, 27.5. 1-27.5. 4, 2014
642014
Optimized laser thermal annealing on germanium for high dopant activation and low leakage current
M Shayesteh, D O’Connell, F Gity, P Murphy-Armando, R Yu, K Huet, ...
IEEE Transactions on Electron Devices 61 (12), 4047-4055, 2014
532014
Doping of semiconductor devices by Laser Thermal Annealing
K Huet, F Mazzamuto, T Tabata, I Toque-Tresonne, Y Mori
Materials Science in Semiconductor Processing 62, 92-102, 2017
492017
Monte Carlo study of apparent mobility reduction in nano-MOSFETs
K Huet, J Saint-Martin, A Bournel, S Galdin-Retailleau, P Dollfus, ...
ESSDERC 2007-37th European Solid State Device Research Conference, 382-385, 2007
492007
Extended defects formation in nanosecond laser-annealed ion implanted silicon
Y Qiu, F Cristiano, K Huet, F Mazzamuto, G Fisicaro, A La Magna, ...
Nano letters 14 (4), 1769-1775, 2014
482014
Defect evolution and dopant activation in laser annealed Si and Ge
F Cristiano, M Shayesteh, R Duffy, K Huet, F Mazzamuto, Y Qiu, M Quillec, ...
Materials Science in Semiconductor Processing 42, 188-195, 2016
472016
Theoretical study of the laser annealing process in FinFET structures
SF Lombardo, G Fisicaro, I Deretzis, A La Magna, B Curver, B Lespinasse, ...
Applied Surface Science 467, 666-672, 2019
392019
Anomalous Impurity Segregation and Local Bonding Fluctuation in -Si
G Fisicaro, K Huet, R Negru, M Hackenberg, P Pichler, N Taleb, ...
Physical Review Letters 110 (11), 117801, 2013
392013
Defect kinetics and dopant activation in submicrosecond laser thermal processes
K Huet, G Fisicaro, J Venturini, H Besaucèle, A La Magna
Applied Physics Letters 95 (23), 2009
362009
Pulsed laser annealing for advanced technology nodes: Modeling and calibration
K Huet, J Aubin, PE Raynal, B Curvers, A Verstraete, B Lespinasse, ...
Applied Surface Science 505, 144470, 2020
322020
Nickel silicide contacts formed by excimer laser annealing for high efficiency solar cells
L Tous, JF Lerat, T Emeraud, R Negru, K Huet, A Uruena, M Aleman, ...
Progress in Photovoltaics: Research and Applications 21 (3), 267-275, 2013
322013
Phase field model of the nanoscale evolution during the explosive crystallization phenomenon
SF Lombardo, S Boninelli, F Cristiano, I Deretzis, MG Grimaldi, K Huet, ...
Journal of Applied Physics 123 (10), 2018
302018
Excimer laser annealing and chemical texturing of ZnO: Al sputtered at room temperature for photovoltaic applications
EV Johnson, P Prod'homme, C Boniface, K Huet, T Emeraud, ...
Solar Energy Materials and solar cells 95 (10), 2823-2830, 2011
302011
Atomically flat low-resistive germanide contacts formed by laser thermal anneal
M Shayesteh, K Huet, I Toqué-Tresonne, R Negru, CLM Daunt, N Kelly, ...
IEEE transactions on electron devices 60 (7), 2178-2185, 2013
292013
Laser Thermal Anneal of polysilicon channel to boost 3D memory performance
JG Lisoni, A Arreghini, G Congedo, M Toledano-Luque, I Toqué-Tresonne, ...
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical …, 2014
252014
Nanosecond laser annealing for phosphorous activation in ultra-thin implanted silicon-on-insulator substrates
PA Alba, S Kerdiles, B Mathieu, R Kachtouli, F Mazzamuto, ...
2016 21st International Conference on Ion Implantation Technology (IIT), 1-4, 2016
232016
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