| Enhancement of voltage-controlled magnetic anisotropy through precise control of Mg insertion thickness at CoFeB| MgO interface X Li, K Fitzell, D Wu, CT Karaba, A Buditama, G Yu, KL Wong, N Altieri, ... Applied Physics Letters 110 (5), 2017 | 123 | 2017 |
| Directional etch of magnetic and noble metals. II. Organic chemical vapor etch JKC Chen, ND Altieri, T Kim, E Chen, T Lill, M Shen, JP Chang Journal of Vacuum Science & Technology A 35 (5), 2017 | 64 | 2017 |
| Plasma–surface interactions at the atomic scale for patterning metals ND Altieri, JKC Chen, L Minardi, JP Chang Journal of Vacuum Science & Technology A 35 (5), 2017 | 39 | 2017 |
| Ion beam assisted organic chemical vapor etch of magnetic thin films JKC Chen, T Kim, ND Altieri, E Chen, JP Chang Journal of Vacuum Science & Technology A 35 (3), 2017 | 30 | 2017 |
| Review on recent progress in patterning phase change materials M Shen, T Lill, N Altieri, J Hoang, S Chiou, J Sims, A McKerrow, ... Journal of Vacuum Science & Technology A 38 (6), 2020 | 13 | 2020 |
| Directional etch of magnetic and noble metals. I. Role of surface oxidation states JKC Chen, ND Altieri, T Kim, T Lill, M Shen, JP Chang Journal of Vacuum Science & Technology A 35 (5), 2017 | 9 | 2017 |
| Controlling surface chemical states for selective patterning of CoFeB ND Altieri, JKC Chen, JP Chang Journal of Vacuum Science & Technology A 37 (1), 2019 | 4 | 2019 |
| Film stack simplification for high aspect ratio patterning and vertical scaling HJ Wu, BJ Van Schravendijk, MN Kawaguchi, G Gunawan, JE Uglow, ... US Patent App. 17/250,835, 2022 | 3 | 2022 |
| Atomic layer etching of magnetic and noble metals N Altieri University of California, Los Angeles, 2018 | 3 | 2018 |
