| Power MEMS and microengines AH Epstein, SD Senturia, G Anathasuresh, A Ayon, K Breuer, KS Chen, ... Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 311 | 1997 |
| Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE) KS Chen, AA Ayón, X Zhang, SM Spearing Journal of Microelectromechanical Systems 11 (3), 264-275, 2002 | 303 | 2002 |
| Micro-heat engines, gas turbines, and rocket engines-The MIT microengine project A Epstein, S Senturia, O Al-Midani, G Anathasuresh, A Epstein, S Senturia, ... 28th Fluid dynamics conference, 1773, 1997 | 271 | 1997 |
| Controlling and testing the fracture strength of silicon on the mesoscale KS Chen, A Ayon, SM Spearing Journal of the American Ceramic Society 83 (6), 1476-1484, 2000 | 145 | 2000 |
| Design and control for an electromagnetically driven X–Y–θ stage KS Chen, DL Trumper, ST Smith Precision Engineering 26 (4), 355-369, 2002 | 122 | 2002 |
| Viscoelastic characterization and modeling of polymer transducers for biological applications IK Lin, KS Ou, YM Liao, Y Liu, KS Chen, X Zhang Journal of Microelectromechanical systems 18 (5), 1087-1099, 2009 | 102 | 2009 |
| Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films X Zhang, KS Chen, R Ghodssi, AA Ayon, SM Spearing Sensors and Actuators A: Physical 91 (3), 373-380, 2001 | 94 | 2001 |
| Modification of curvature-based thin-film residual stress measurement for MEMS applications KS Chen, KS Ou Journal of Micromechanics and Microengineering 12 (6), 917, 2002 | 89 | 2002 |
| Intrinsic stress generation and relaxation of plasma-enhanced chemical vapor deposited oxide during deposition and subsequent thermal cycling KS Chen, X Zhang, SY Lin Thin Solid Films 434 (1-2), 190-202, 2003 | 71 | 2003 |
| Development of semi-empirical formulation for extracting materials properties from nanoindentation measurements: Residual stresses, substrate effect, and creep KS Chen, TC Chen, KS Ou Thin Solid Films 516 (8), 1931-1940, 2008 | 69 | 2008 |
| Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies KS Chen, IK Lin, FH Ko Journal of Micromechanics and Microengineering 15 (10), 1894, 2005 | 69 | 2005 |
| Micro‐Gas Turbine Engine Materials and Structures SM Spearing, KS Chen Proceedings of the 21st Annual Conference on Composites, Advanced Ceramics …, 1997 | 63 | 1997 |
| Finite-element analysis on wafer-level CMP contact stress: reinvestigated issues and the effects of selected process parameters KS Chen, HM Yeh, JL Yan, YT Chen The International Journal of Advanced Manufacturing Technology 42, 1118-1130, 2009 | 61 | 2009 |
| IR indoor localization and wireless transmission for motion control in smart building applications based on Wiimote technology PW Chen, KS Ou, KS Chen Proceedings of SICE Annual Conference 2010, 1781-1785, 2010 | 54 | 2010 |
| Viscoelastic mechanical behavior of soft microcantilever-based force sensors I Lin, YM Liao, Y Liu, KS Ou, KS Chen, X Zhang Applied Physics Letters 93 (25), 2008 | 50 | 2008 |
| Mechanical property characterization of sputtered and plasma enhanced chemical deposition (PECVD) silicon nitride films after rapid thermal annealing PH Wu, IK Lin, HY Yan, KS Ou, KS Chen, X Zhang Sensors and Actuators A: Physical 168 (1), 117-126, 2011 | 48 | 2011 |
| Full-field wafer level thin film stress measurement by phase-stepping shadow Moire/spl acute KS Chen, TYF Chen, CC Chuang, IK Lin IEEE Transactions on Components and Packaging Technologies 27 (3), 594-601, 2004 | 48 | 2004 |
| Design, analysis, and experimental studies of a novel PVDF-based piezoelectric energy harvester with beating mechanisms HH Huang, KS Chen Sensors and Actuators A: Physical 238, 317-328, 2016 | 46 | 2016 |
| Command-shaping techniques for electrostatic MEMS actuation: Analysis and simulation KS Chen, KS Ou Journal of microelectromechanical systems 16 (3), 537-549, 2007 | 44 | 2007 |
| Large deflection analysis of a pre-stressed annular plate with a rigid boss under axisymmetric loading YH Su, KS Chen, DC Roberts, SM Spearing Journal of Micromechanics and Microengineering 11 (6), 645, 2001 | 43 | 2001 |
