| Refractive microlens fabrication by ink-jet process S Biehl, R Danzebrink, P Oliveira, MA Aegerter Journal of Sol-Gel Science and Technology 13, 177-182, 1998 | 98 | 1998 |
| Micro force sensor with piezoresistive amorphous carbon strain gauge E Peiner, A Tibrewala, R Bandorf, S Biehl, H Lüthje, L Doering Sensors and actuators A: Physical 130, 75-82, 2006 | 90 | 2006 |
| Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje Applied surface science 252 (15), 5387-5390, 2006 | 77 | 2006 |
| Multifunctional thin film sensors based on amorphous diamond-like carbon for use in tribological applications S Biehl, H Lüthje, R Bandorf, JH Sick Thin solid films 515 (3), 1171-1175, 2006 | 52 | 2006 |
| Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje Thin Solid Films 515 (20-21), 8028-8033, 2007 | 42 | 2007 |
| Piezoresistive gauge factor of hydrogenated amorphous carbon films A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje Journal of micromechanics and microengineering 16 (6), S75, 2006 | 36 | 2006 |
| Thin film sensor for wear detection of cutting tools H Lüthje, R Bandorf, S Biehl, B Stint Sensors and Actuators A: Physical 116 (1), 133-136, 2004 | 35 | 2004 |
| The piezoresistive effect in diamond-like carbon films A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje Journal of micromechanics and microengineering 17 (7), S77, 2007 | 34 | 2007 |
| Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems S Biehl, S Staufenbiel, F Hauschild, A Albert Microsystem Technologies 16, 879-883, 2010 | 25 | 2010 |
| Multifunctional thin film sensor system as monitoring system in production S Biehl, C Rumposch, N Paetsch, G Bräuer, D Weise, P Scholz, ... Microsystem Technologies 22, 1757-1765, 2016 | 21 | 2016 |
| Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon H Luthje, S Biehl, R Bandorf, JH Sick, E Peiner, A Tibrewala The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 18 | 2005 |
| Thin film sensors for condition monitoring in ball screw drives S Biehl, S Staufenbiel, S Recknagel, B Denkena, O Bertram 1st Joint International Symposium on System-Integrated Intelligence, 27-29, 2012 | 16 | 2012 |
| Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon S Biehl, C Rumposch, G Bräuer, HW Hoffmeister, M Luig Microsystem technologies 20, 989-993, 2014 | 11 | 2014 |
| Force-sensing device for measuring force on solid state actuators, method for measuring force, as well as use of force-sensing device H Luthje, S Biehl, D Mayer, T Melz, S Herold US Patent App. 12/298,035, 2012 | 11 | 2012 |
| Bearing device having a sensor for measuring the vertical bearing force of a rotating shaft S Biehl, B Lüneburg US Patent 8,869,633, 2014 | 10 | 2014 |
| Control device for non-positive connections H Lüthje, S Biehl, R Bandorf US Patent 7,350,419, 2008 | 9 | 2008 |
| Smart coatings for intelligent surfaces G Bräuer, R Bandorf, S Biehl, A Dietz, H Lüthje, M Vergöhl Vakuum in Forschung und Praxis 20 (S1 1), 34-37, 2008 | 7 | 2008 |
| Laser-patterning of thin films deposited on complex surfaces for the fabrication of micro-sensors S Biehl, H Lüthje | 7 | 2004 |
| Wear-resistive thin-film sensors on cutting tools for in-process temperature measurement M Plogmeyer, G González, S Biehl, V Schulze, G Bräuer Procedia CIRP 101, 85-88, 2021 | 6 | 2021 |
| Effect of tool coatings on surface grain refinement in orthogonal cutting of AISI 4140 steel G González, M Plogmeyer, F Zanger, S Biehl, G Bräuer, V Schulze Procedia CIRP 87, 176-180, 2020 | 6 | 2020 |
