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Goutham Arutchelvan
Goutham Arutchelvan
Corporate Research, TSMC
Verified email at tsmc.com
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Cited by
Year
2D materials: roadmap to CMOS integration
C Huyghebaert, T Schram, Q Smets, TK Agarwal, D Verreck, S Brems, ...
2018 IEEE International Electron Devices Meeting (IEDM), 22.1. 1-22.1. 4, 2018
942018
Ultra-scaled MOCVD MoS2 MOSFETs with 42nm contact pitch and 250µA/µm drain current
IR Quentin Smets, Goutham Arutchelvan , Julien Jussot , Devin Verreck , Inge ...
2019 IEEE International Electron Devices Meeting (IEDM), 2019
812019
From the metal to the channel: A study of carrier injection through the metal/2D MoS 2 interface
G Arutchelvan, CJL de la Rosa, P Matagne, S Sutar, I Radu, ...
Nanoscale 9 (30), 10869-10879, 2017
742017
MoS2 Functionalization with a Sub-nm Thin SiO2 Layer for Atomic Layer Deposition of High-κ Dielectrics
H Zhang, G Arutchelvan, J Meersschaut, A Gaur, T Conard, H Bender, ...
Chemistry of Materials 29 (16), 6772-6780, 2017
392017
Impact of device scaling on the electrical properties of MoS2 field-effect transistors
G Arutchelvan, Q Smets, D Verreck, Z Ahmed, A Gaur, S Sutar, J Jussot, ...
Scientific reports 11 (1), 6610, 2021
372021
Wafer-scale integration of double gated WS2-transistors in 300mm Si CMOS fab
I Asselberghs, Q Smets, T Schram, B Groven, D Verreck, A Afzalian, ...
2020 IEEE International Electron Devices Meeting (IEDM), 40.2. 1-40.2. 4, 2020
362020
Introducing 2D-FETs in device scaling roadmap using DTCO
Z Ahmed, A Afzalian, T Schram, D Jang, D Verreck, Q Smets, ...
2020 IEEE International Electron Devices Meeting (IEDM), 22.5. 1-22.5. 4, 2020
352020
Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers
D Marinov, JF de Marneffe, Q Smets, G Arutchelvan, KM Bal, E Voronina, ...
npj 2D Materials and Applications 5 (1), 17, 2021
322021
Buried power rail integration with FinFETs for ultimate CMOS scaling
A Gupta, OV Pedreira, G Arutchelvan, H Zahedmanesh, K Devriendt, ...
IEEE Transactions on Electron Devices 67 (12), 5349-5354, 2020
322020
Insight on the characterization of MoS2 based devices and requirements for logic device integration
CJL de la Rosa, G Arutchelvan, I Radu, D Lin, C Huyghebaert, M Heyns, ...
ECS Journal of Solid State Science and Technology 5 (11), Q3072, 2016
322016
The Role of Nonidealities in the Scaling of MoS2 FETs
D Verreck, G Arutchelvan, CJL De La Rosa, A Leonhardt, D Chiappe, ...
IEEE Transactions on Electron Devices 65 (10), 4635-4640, 2018
212018
Enabling logic with backside connectivity via n-TSVs and its potential as a scaling booster
A Veloso, A Jourdain, G Hiblot, F Schleicher, K D’have, F Sebaai, ...
2021 Symposium on VLSI Technology, 1-2, 2021
172021
Graphene based Van der Waals contacts on MoS2 field effect transistors
V Mootheri, G Arutchelvan, S Banerjee, S Sutar, A Leonhardt, ME Boulon, ...
2D Materials 8 (1), 015003, 2020
172020
Sources of variability in scaled MoS2 FETs
Q Smets, D Verreck, Y Shi, G Arutchelvan, B Groven, X Wu, S Sutar, ...
2020 IEEE International Electron Devices Meeting (IEDM), 3.1. 1-3.1. 4, 2020
162020
Buried power rail integration with Si FinFETs for CMOS scaling beyond the 5 nm node
A Gupta, H Mertens, Z Tao, S Demuynck, J Bömmels, G Arutchelvan, ...
2020 IEEE Symposium on VLSI Technology, 1-2, 2020
162020
Transport properties of chemically synthesized MoS2–Dielectric effects and defects scattering
M Mongillo, D Chiappe, G Arutchelvan, I Asselberghs, M Perucchini, ...
Applied Physics Letters 109 (23), 2016
162016
IEEE International Electron Devices Meeting (IEDM)
Q Smets, G Arutchelvan, J Jussot, D Verreck, I Asselberghs, AN Mehta, ...
IEEE, 2019
132019
Relation between film thickness and surface doping of MoS2 based field effect transistors
CJ Lockhart de la Rosa, G Arutchelvan, A Leonhardt, C Huyghebaert, ...
Apl Materials 6 (5), 2018
132018
2018 IEEE Int. Electron Devices Meeting (IEDM)
C Huyghebaert, T Schram, Q Smets, TK Agarwal, D Verreck, S Brems, ...
IEEE, 2018
122018
Scaled FinFETs connected by using both wafer sides for routing via buried power rails
A Veloso, A Jourdain, D Radisic, R Chen, G Arutchelvan, B O’Sullivan, ...
IEEE Transactions on Electron Devices 69 (12), 7173-7179, 2022
112022
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