Steven R. Gillmer
Title
Cited by
Cited by
Year
Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology
X Yu, SR Gillmer, SC Woody, JD Ellis
Review of Scientific Instruments 87 (6), 065109, 2016
212016
Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration
SR Gillmer, RCG Smith, SC Woody, JD Ellis
Measurement Science and Technology 25 (7), 075205, 2014
212014
Beam geometry, alignment, and wavefront aberration effects on interferometric differential wavefront sensing
X Yu, SR Gillmer, JD Ellis
Measurement Science and Technology 26 (12), 125203, 2015
172015
Robust high-dynamic-range optical roll sensing
SR Gillmer, X Yu, C Wang, JD Ellis
Optics letters 40 (11), 2497-2500, 2015
162015
Focused beam scatterometry for deep subwavelength metrology
TG Brown, MA Alonso, A Vella, MJ Theisen, ST Head, SR Gillmer, JD Ellis
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and …, 2014
102014
Predicting the failure of ultrathin porous membranes in bulge tests
SR Gillmer, DZ Fang, SE Wayson, JD Winans, N Abdolrahim, ...
Thin Solid Films 631, 152-160, 2017
82017
Development of a novel fiber-coupled three degree-of-freedom displacement interferometer
SR Gillmer
University of Rochester. Department of Mechanical Engineering, 2013
72013
Miniature, Fiber-Coupled 3-DOF Interferometer for Precision Micro-Motion Stage Metrology
SR Gillmer, C Wang, JD Ellis, SC Woody, J Tarbutton, B Woods
Proceedings of the 27th ASPE Annual Meeting 34, 10 pp, 2012
7*2012
Anomalous vibration suppression in a weak-value-emulated heterodyne roll interferometer
SR Gillmer, J Martínez-Rincón, JD Ellis
Optics express 26 (22), 29311-29318, 2018
62018
Amplitude, phase, and polarization control with a single spatial light modulator
MJ Theisen, ST Head, TG Brown, SR Gillmer, JD Ellis
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and …, 2014
62014
Straightness measurement based on knife-edge sensing
C Wang, X Yu, SR Gillmer, JD Ellis
31st ASPE Annual Meeting, 2016
42016
Methods for performance evaluation of single axis positioning systems: dynamic angular performance
JD Ellis, SR Gillmer, B O'Connor
28th Annual Meeting of the American Society for Precision Engineering, ASPE …, 2013
42013
Fiber-coupled 3-DOF interferometer for EUV lithography stage metrology
JD Ellis, S Gillmer, C Wang, R Smith, SC Woody, J Tarbutton
ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics …, 2012
42012
Application of wavelet analysis in heterodyne interferometry
C Lu, SR Gillmer, JD Ellis, TL Schmitz, J Troutman, JA Tarbutton
Proceedings of the 28th ASPE Annual Meeting, 2013
22013
Beam Aberration Analysis of Differential Wavefront Interferometry
X Yu, SR Gillmer, C Wang, JD Ellis
Proceedings of the 29th ASPE Annual Meeting, 2014
12014
Compact Six Degree-of-Freedom Interferometer for Precision Linear Stage Metrology
X Yu, SR Gillmer, SC Howard, SC Woody, JD Ellis
Proc ASPE, 2015, 0
1*
A multifunctional high strain composite (HSC) hinge for deployable in-space optomechanics
MA Echter, SR Gillmer, MJ Silver, BM Reid, RE Martinez
Smart Materials and Structures 29 (10), 105010, 2020
2020
Precision scanning onboard the NASA TROPICS mission
S Gillmer, C McMenamin, B Powers, J Racamato, M DiLiberto, ...
Proc ASPE, 2018, 2018
2018
Resolution and functionality enhancements in optical metrology
SR Gillmer
University of Rochester, 2016
2016
Systems-level integration for focused beam scatterometry
SR Gillmer, ST Head, MJ Theisen, TG Brown, JD Ellis
30th Annual Meeting of the American Society for Precision Engineering, ASPE …, 2015
2015
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