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Tobias Zengerle
Tobias Zengerle
Ph. D. Student Saarland University
Verified email at lmm.uni-saarland.de - Homepage
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Cited by
Cited by
Year
Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures
A Ababneh, AMK Dagamseh, Z Albataineh, M Tantawi, QM Al-Bataineh, ...
Microsystem Technologies 27 (8), 3149-3159, 2021
142021
Optical characterization of sputtered aluminum nitride thin films–correlating refractive index with degree of c-axis orientation
A Ababneh, Z Albataineh, AMK Dagamseh, IS Al-Kofahi, B Schäfer, ...
Thin Solid Films 693, 137701, 2020
132020
Modeling the damping mechanism of MEMS oscillators in the transitional flow regime with thermal waves
T Zengerle, J Joppich, P Schwarz, A Ababneh, H Seidel
Sensors and Actuators A: Physical 311, 112068, 2020
62020
Polyatomic degrees of freedom and their temporal evolution extracted from the damping of micro-oscillators
T Zengerle, J Joppich, P Schwarz, A Ababneh, H Seidel
Sensors and Actuators A: Physical 297, 111460, 2019
62019
Using the nonlinear Duffing effect of piezoelectric micro-oscillators for wide-range pressure sensing
T Zengerle, M Stopp, A Ababneh, H Seidel
Actuators 10 (8), 172, 2021
42021
Investigations on nonlinearities of roof tile-shape modes for pressure measurement applications
T Zengerle, M Stopp, A Ababneh, H Seidel
2021 21st International Conference on Solid-State Sensors, Actuators and …, 2021
42021
Generalized Damping Model for MEMS Oscillators from Molecular to Viscous Flow Regime
T Zengerle, A Ababneh, H Seidel
Eng 3 (1), 124-141, 2022
32022
Equivalent circuit model for the damping of micro-oscillators from molecular to viscous flow regime
T Zengerle, J Joppich, H Lensch, A Ababneh, H Seidel
Journal of Micromechanics and Microengineering 31 (9), 095010, 2021
12021
A lumped element model for the damping mechanism of micro-oscillators in the transitional flow regime
T Zengerle, J Joppich, H Lensch, A Ababneh, H Seidel
2020 32nd International Conference on Microelectronics (ICM), 1-4, 2020
12020
Thermal resonance model for micro-oscillators in the vicinity of a geometric boundary
T Zengerle, A Ababneh, H Seidel
Sensors and Actuators A: Physical 341, 113614, 2022
2022
Generalized Damping Model for MEMS Oscillators from Molecular to Viscous Flow Regime. Eng 2022, 3, 124–140
T Zengerle, A Ababneh, H Seidel
Feature Papers in Eng, 21, 2022
2022
Damping of piezoelectric MEMS oscillators–fundamentals and applications
T Zengerle
Saarländische Universitäts-und Landesbibliothek, 2022
2022
Using the Nonlinear Duffing Effect of Piezoelectric Micro-Oscillators for Wide-Range Pressure Sensing. Actuators 2021, 10, 172
T Zengerle, M Stopp, A Ababneh, H Seidel
s Note: MDPI stays neutral with regard to jurisdictional claims in published …, 2021
2021
Influence of Molecular Degrees of Freedom on the Gas Damping Behavior of Micro-Oscillators in the Molecular Flow Regime
T Zengerle, J Joppich, A Ababneh, P Schwarz, K Bauer, H Seidel
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
2019
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