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Shantanu Karkari
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Investigation of the pulsed magnetron discharge by time-and energy-resolved mass spectrometry
M Mišina, JW Bradley, H Bäcker, Y Aranda-Gonzalvo, SK Karkari, ...
Vacuum 68 (2), 171-181, 2002
822002
Effect of radio-frequency power levels on electron density in a confined two-frequency capacitively-coupled plasma processing tool
SK Karkari, AR Ellingboe
Applied physics letters 88 (10), 2006
782006
A floating hairpin resonance probe technique for measuring time-resolved electron density in pulse discharge
SK Karkari, C Gaman, AR Ellingboe, I Swindells, JW Bradley
Measurement Science and Technology 18 (8), 2649, 2007
702007
A study of the transient plasma potential in a pulsed bi-polar dc magnetron discharge
JW Bradley, SK Karkari, A Vetushka
Plasma Sources Science and Technology 13 (2), 189, 2004
662004
Measurement of the plasma potential adjacent to the substrate in a midfrequency bipolar pulsed magnetron
SK Karkari, A Vetushka, JW Bradley
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (6 …, 2003
512003
Surface loss rates of H and Cl radicals in an inductively coupled plasma etcher derived from time-resolved electron density and optical emission measurements
GA Curley, L Gatilova, S Guilet, S Bouchoule, GS Gogna, N Sirse, ...
Journal of Vacuum Science & Technology A 28 (2), 360-372, 2010
492010
Two-dimensional spatial survey of the plasma potential and electric field in a pulsed bipolar magnetron discharge
A Vetushka, SK Karkari, JW Bradley
Journal of Vacuum Science & Technology A 22 (6), 2459-2468, 2004
452004
Direct measurement of spatial electron density oscillations in a dual frequency capacitive plasma
SK Karkari, AR Ellingboe, C Gaman
Applied Physics Letters 93 (7), 2008
402008
Triple probe interrogation of spokes in a HiPIMS discharge
FL Estrin, SK Karkari, JW Bradley
Journal of Physics D: Applied Physics 50 (29), 295201, 2017
362017
Using the resonance hairpin probe and pulsed photodetachment technique as a diagnostic for negative ions in oxygen plasma
J Conway, N Sirse, SK Karkari, MM Turner
Plasma Sources Science and Technology 19 (6), 065002, 2010
362010
Characterization of the pulse plasma source
V Milosavljević, SK Karkari, AR Ellingboe
Plasma Sources Science and Technology 16 (2), 304, 2007
322007
Influence of ion bombardment on the surface functionalization of plasma deposited coatings
RP Gandhiraman, SK Karkari, SM Daniels, B McCraith
Surface and Coatings Technology 203 (23), 3521-3526, 2009
312009
A technique for obtaining time-and energy-resolved mass spectroscopic measurements on pulsed plasmas
SK Karkari, H Bäcker, D Forder, JW Bradley
Measurement Science and Technology 13 (9), 1431, 2002
312002
The temporal evolution in plasma potential during laser photo-detachment used to diagnose electronegative plasma
JCMMT N Sirse, S K Karkari, M A Mujawar
Plasma Sources Science and Technology 20 (5), 2011
242011
Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge
JW Bradley, R Dodd, SD You, N Sirse, SK Karkari
Journal of Vacuum Science & Technology A 29 (3), 2011
232011
Microwave resonances of a hairpin probe in a magnetized plasma
GS Gogna, SK Karkari
Applied Physics Letters 96 (15), 2010
232010
Probing negative ion density and temperature using a resonance hairpin probe
N Sirse, SK Karkari, MM Turner
Plasma Sources Science and Technology 24 (2), 022001, 2015
212015
Electron density modulation in an asymmetric bipolar pulsed dc magnetron discharge
SK Karkari, AR Ellingboe, C Gaman, I Swindells, JW Bradley
Journal of Applied Physics 102 (6), 2007
182007
Electron series resonance in a magnetized 13.56 MHz symmetric capacitive coupled discharge
JK Joshi, S Binwal, SK Karkari, S Kumar
Journal of Applied Physics 123 (11), 2018
172018
Characteristics of floating potential of a probe in electronegative plasma
AK Pandey, SK Karkari
Physics of Plasmas 24 (1), 2017
172017
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Articles 1–20