עקוב אחר
Jing Jiang
Jing Jiang
Research scientist, Imec
כתובת אימייל מאומתת בדומיין cornell.edu
כותרת
צוטט על ידי
צוטט על ידי
שנה
Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups
L Li, S Chakrabarty, J Jiang, B Zhang, C Ober, EP Giannelis
Nanoscale 8 (3), 1338-1343, 2016
612016
Metal oxide nanoparticle photoresists for EUV patterning
J Jiang, S Chakrabarty, M Yu, CK Ober
Journal of Photopolymer Science and Technology 27 (5), 663-666, 2014
552014
Ultrafast self-assembly of sub-10 nm block copolymer nanostructures by solvent-free high-temperature laser annealing
J Jiang, AG Jacobs, B Wenning, C Liedel, MO Thompson, CK Ober
ACS applied materials & interfaces 9 (37), 31317-31324, 2017
392017
Unraveling the role of secondary electrons upon their interaction with photoresist during EUV exposure
I Pollentier, Y Vesters, J Jiang, P Vanelderen, D De Simone
International Conference on Extreme Ultraviolet Lithography 2017 10450, 65-71, 2017
262017
Oxide nanoparticle EUV (ONE) photoresists: Current understanding of the unusual patterning mechanism
J Jiang, B Zhang, M Yu, L Li, M Neisser, JS Chun, EP Giannelis, CK Ober
Journal of Photopolymer Science and Technology 28 (4), 515-518, 2015
262015
Difference in EUV photoresist design towards reduction of LWR and LCDU
J Jiang, D De Simone, G Vandenberghe
Advances in Patterning Materials and Processes XXXIV 10146, 64-71, 2017
172017
Comparative Metabolomic Study of Penicillium chrysogenum During Pilot and Industrial Penicillin Fermentations
MZ Ding, H Lu, JS Cheng, Y Chen, J Jiang, B Qiao, BZ Li, YJ Yuan
Applied biochemistry and biotechnology 168, 1223-1238, 2012
172012
New developments in ligand-stabilized metal oxide nanoparticle photoresists for EUV lithography
C Ober, J Jiang, B Zhang, L Li, E Giannelis, JS Chun, M Neisser, ...
Extreme Ultraviolet (EUV) Lithography VI 9422, 27-32, 2015
152015
Control of polystyrene-block-poly(methyl methacrylate) directed self-assembly by laser-induced millisecond thermal annealing
AG Jacobs, B Jung, J Jiang, CK Ober, MO Thompson
Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031205-031205, 2015
142015
Laser spike annealing of DSA photoresists
J Jiang, A Jacobs, MO Thompson, CK Ober
Journal of Photopolymer Science and Technology 28 (5), 631-634, 2015
132015
Sensitizers in EUV chemically amplified resist: mechanism of sensitivity improvement
Y Vesters, J Jiang, H Yamamoto, D De Simone, T Kozawa, S De Gendt, ...
Extreme Ultraviolet (EUV) Lithography IX 10583, 28-38, 2018
122018
Role of Metal Sensitizers for Sensitivity Improvement in EUV Chemically Amplified Resist
H Yamamoto, Y Vesters, J Jiang, D De Simone, G Vandenberghe, ...
Journal of photopolymer science and technology 31 (6), 747-751, 2018
82018
Metal sensitizer in chemically amplified EUV resist: a study of sensitivity enhancement and dissolution
J Jiang, D De Simone, G Vandenberghe
Journal of Photopolymer Science and Technology 30 (5), 591-597, 2017
82017
Sensitizers in extreme ultraviolet chemically amplified resists: mechanism of sensitivity improvement
Y Vesters, J Jiang, H Yamamoto, D De Simone, T Kozawa, S De Gendt, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 17 (4), 043506-043506, 2018
72018
Systematic study of ligand structures of metal oxide EUV nanoparticle photoresists
J Jiang, M Yu, B Zhang, M Neisser, JS Chun, EP Giannelis, CK Ober
Extreme Ultraviolet (EUV) Lithography VI 9422, 664-669, 2015
72015
Sensitizer for euv chemically amplified resist: Metal versus halogen
J Jiang, G Giordano, R Fallica, D DeSimone, G Vandenberghe
Journal of Photopolymer Science and Technology 32 (1), 21-25, 2019
62019
Impact of acid statistics on EUV local critical dimension uniformity
J Jiang, D De Simone, O Yildirim, M Meeuwissen, R Hoefnagels, ...
Extreme Ultraviolet (EUV) Lithography VIII 10143, 428-438, 2017
52017
Line edge roughness of high deprotection activation energy photoresist by using sub-millisecond post exposure bake
J Jiang, B Jung, MO Thompson, CK Ober
Advances in Resist Materials and Processing Technology XXX 8682, 443-449, 2013
52013
Chemical reaction and diffusion kinetics during laser-induced submillisecond heating for lithographic applications
J Jiang, B Jung, MO Thompson, CK Ober
Journal of Vacuum Science & Technology B 37 (4), 2019
42019
Line width roughness reduction by rational design of photoacid generator for sub-millisecond laser post-exposure bake
J Jiang, MO Thompson, CK Ober
Advances in Patterning Materials and Processes XXXI 9051, 81-86, 2014
32014
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מאמרים 1–20