| Piezoresistive microcantilevers for humidity sensing J Xu, M Bertke, HS Wasisto, E Peiner Journal of Micromechanics and Microengineering 29 (5), 053003, 2019 | 78 | 2019 |
| Fabrication of ZnO nanorods and Chitosan@ ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing J Xu, M Bertke, X Li, H Mu, H Zhou, F Yu, G Hamdana, A Schmidt, ... Sensors and Actuators B: Chemical 273, 276-287, 2018 | 70 | 2018 |
| Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection M Bertke, G Hamdana, W Wu, HS Wasisto, E Uhde, E Peiner Journal of Micromechanics and Microengineering 27 (6), 064001, 2017 | 40 | 2017 |
| Towards fabrication of 3D isotopically modulated vertical silicon nanowires in selective areas by nanosphere lithography G Hamdana, T Südkamp, M Descoins, D Mangelinck, L Caccamo, ... Microelectronic Engineering 179, 74-82, 2017 | 37 | 2017 |
| Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching G Hamdana, P Puranto, J Langfahl-Klabes, Z Li, F Pohlenz, M Xu, ... Sensors and Actuators A: Physical 283, 65-78, 2018 | 33 | 2018 |
| Piezoelectric MEMS resonators for cigarette particle detection J Toledo, V Ruiz-Díez, M Bertke, H Suryo Wasisto, E Peiner, ... Micromachines 10 (2), 145, 2019 | 29 | 2019 |
| In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection A Setiono, M Bertke, WO Nyang’au, J Xu, M Fahrbach, I Kirsch, E Uhde, ... Sensors 20 (3), 618, 2020 | 25 | 2020 |
| Real-time frequency tracking of an electro-thermal piezoresistive cantilever resonator with ZnO nanorods for chemical sensing A Setiono, J Xu, M Fahrbach, M Bertke, WO Nyang’au, HS Wasisto, ... Chemosensors 7 (1), 2, 2019 | 23 | 2019 |
| Fabrication of ZnO nanorods on MEMS piezoresistive silicon microcantilevers for environmental monitoring J Xu, M Bertke, A Gad, F Yu, G Hamdana, A Bakin, E Peiner Proceedings 1 (4), 290, 2017 | 19 | 2017 |
| Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system G Hamdana, M Bertke, L Doering, T Frank, U Brand, HS Wasisto, E Peiner Journal of Sensors and Sensor Systems 6 (1), 121-133, 2017 | 18 | 2017 |
| Contact resonance spectroscopy for on-the-machine manufactory monitoring M Bertke, M Fahrbach, G Hamdana, J Xu, HS Wasisto, E Peiner Sensors and Actuators A: Physical 279, 501-508, 2018 | 16 | 2018 |
| Piezoresistive silicon cantilever covered by ZnO nanorods for humidity sensing J Yang, J Xu, W Wu, M Bertke, HS Wasisto, E Peiner Procedia Engineering 168, 1114-1117, 2016 | 16 | 2016 |
| Area-selective growth of aligned ZnO nanorod arrays for MEMS device applications J Xu, K Strempel, H Zhou, A Waag, M Bertke, A Schmidt, E Peiner Proceedings 2 (13), 887, 2018 | 14 | 2018 |
| Size-selective electrostatic sampling and removal of nanoparticles on silicon cantilever sensors for air-quality monitoring M Bertke, W Wu, HS Wasisto, E Uhde, E Peiner 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 14 | 2017 |
| Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection M Bertke, J Xu, A Setiono, I Kirsch, E Uhde, E Peiner Journal of Micromechanics and Microengineering 30 (1), 014001, 2019 | 13 | 2019 |
| Strategy toward miniaturized, self-out-readable resonant cantilever and integrated electrostatic microchannel separator for highly sensitive airborne nanoparticle detection M Bertke, J Xu, M Fahrbach, A Setiono, HS Wasisto, E Peiner Sensors 19 (4), 901, 2019 | 12 | 2019 |
| Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement A Setiono, WO Nyang’au, M Fahrbach, J Xu, M Bertke, HS Wasisto, ... Journal of Micromechanics and Microengineering 29 (12), 124006, 2019 | 11 | 2019 |
| Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors A Setiono, M Fahrbach, J Xu, M Bertke, WO Nyang'au, G Hamdana, ... Journal of Sensors and Sensor Systems 8 (1), 37-48, 2019 | 11 | 2019 |
| Self-actuating and self-sensing ZNO nanorods/chitosan coated piezoresistive silicon microcantilever for humidit Y sensing J Xu, M Bertke, X Li, H Mu, F Yu, A Schmidt, A Bakin, E Peiner 2018 IEEE Micro Electro Mechanical Systems (MEMS), 206-209, 2018 | 11 | 2018 |
| Cantilever-droplet-based sensing of magnetic particle concentrations in liquids WO Nyang’au, A Setiono, M Bertke, H Bosse, E Peiner Sensors 19 (21), 4758, 2019 | 10 | 2019 |
