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Michael E. Adel
Michael E. Adel
Lumus LTD
Verified email at lumus-optical.com
Title
Cited by
Cited by
Year
Spectral bio-imaging of the eye
D Cabib, M Adel, RA Buckwald, E Horn
US Patent 6,556,853, 2003
3652003
Ion‐beam‐induced hydrogen release from a‐C:H: A bulk molecular recombination model
ME Adel, O Amir, R Kalish, LC Feldman
Journal of Applied Physics 66 (7), 3248-3251, 1989
1721989
Overlay metrology and control method
M Adel, M Ghinovker, E Kassel, B Golovanevsky, JC Robinson, CA Mack, ...
US Patent 7,804,994, 2010
1682010
Greywater use in Israel and worldwide: standards and prospects
G Oron, M Adel, V Agmon, E Friedler, R Halperin, E Leshem, D Weinberg
Water research 58, 92-101, 2014
1632014
Overlay marks, methods of overlay mark design and methods of overlay measurements
M Adel, M Ghinovker, WD Mieher
US Patent 6,985,618, 2006
1342006
Continuously varying offset mark and methods of determining overlay
ME Adel, JL Seligson, D Kandel
US Patent 7,440,105, 2008
1182008
Apparatus and methods for detecting overlay errors using scatterometry
WD Mieher, A Levy, B Golovanesky, M Friedmann, I Smith, M Adel, ...
US Patent 7,317,531, 2008
1162008
Effects of heavy ion irradiation on amorphous hydrogenated (diamondlike) carbon films
S Prawer, R Kalish, M Adel, V Richter
Journal of applied physics 61 (9), 4492-4500, 1987
1151987
Overlay marks, methods of overlay mark design and methods of overlay measurements
M Adel, M Ghinovker
US Patent 6,921,916, 2005
1112005
Use of overlay diagnostics for enhanced automatic process control
JL Seligson, M Ghinovker, J Robinson, P Izikson, ME Adel, B Simkin, ...
US Patent 6,928,628, 2005
1062005
Spectral bio-imaging of the eye
D Cabib, M Adel, RA Buckwald
US Patent 6,198,532, 2001
922001
Spectral bio-imaging of the eye
D Cabib, M Adel, RA Buckwald
US Patent 6,419,361, 2002
902002
Film thickness mapping using interferometric spectral imaging
D Cabib, RA Buckwald, ME Adel
US Patent 5,856,871, 1999
891999
Apparatus and methods for detecting overlay errors using scatterometry
WD Mieher, A Levy, B Golovanesky, M Friedmann, I Smith, ME Adel, ...
US Patent 7,242,477, 2007
882007
Spectral imaging using illumination of preselected spectral content
ME Adel, D Cabib, D Wine
US Patent 6,142,629, 2000
832000
On-device metrology
AV Shchegrov, JM Madsen, SI Pandev, A Levy, D Kandel, ME Adel, ...
US Patent 9,875,946, 2018
762018
Overlay marks, methods of overlay mark design and methods of overlay measurements
M Adel, M Ghinovker, WD Mieher, A Levy, D Wack
US Patent 7,181,057, 2007
742007
Apparatus and methods for detecting overlay errors using scatterometry
WD Mieher, A Levy, B Golovanesky, M Friedmann, I Smith, ME Adel, ...
US Patent 7,379,183, 2008
662008
Apparatus and methods for detecting overlay errors using scatterometry
WD Mieher, A Levy, B Golovanesky, M Friedmann, I Smith, ME Adel, ...
US Patent 7,280,212, 2007
662007
Apparatus and methods for detecting overlay errors using scatterometry
WD Mieher, A Levy, B Golovanevsky, M Friedmann, I Smith, ME Adel, ...
US Patent 7,298,481, 2007
642007
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